Dear participants of ALD Russia 2015, the updated version of Technical Program is now available.
Invited speakers
- The origins of ML-ALD in the USSR-Russia: from V. B. Aleskovskiiיs “framework hypothesis” on the path to precise synthesis of solids, A.A. Malygin, St. Petersburg Technological University, Russia.
- Atomic Layer Etching Using Thermal Reactions: ALD in Reverse, Steven M. George, University of Colorado at Boulder, USA.
- How conformal is conformal? Exploring the limits of ALD film conformality with VTT’s lateral microscopic test structure, Riikka Puurunen, VTT, Finland.
- The nature of electron and hole traps responsible for localization and charge transport in high-k dielectrics, V.A. Gritsenko, Rzhanov Institute of Semiconductor Physics SB RAS.
- Atomic layer deposition of Ge2Sb2Te5 thin films for phase change memory, Cheol Seong Hwang, Seoul National University, Korea.
- Atomic layer deposition for rare earth oxides and thermoelectric thin films, Giovanna Scarel, James Medison University, USA.
- Plasma-assisted ALD: status and prospects, Erwin Kessels, Eindhoven University of Technology, Netherlands.
- In-Situ Studies of ALD on 2D Materials, Robert M. Wallace, University of Texas at Dallas, USA.
- ALD nanolaminates for solar cell application, Ingo Dirnstorfer, Namlab, Germany.
- Atomic layer deposition of transition metal dichalcogenides, two-dimensional semiconductors, Annelies Delabie, IMEC, Belgium.
- Chemistry of platinum group metal compounds as precursors for Chemical Vapor Deposition, N.B. Morozova, A.V. Nikolaev Institute of Inorganic Chemistry, Russia.
- Ruthenium and Iridium thin deposition: summary and issues, V.Yu. Vasiliev, Novosibirsk state technical university and SibIS LLC, Russia.
- ALD of oxides for nanoelectronic devices: status and perspectives, Sabina Spiga, CNR-IMM-MDM, Italy.
- Nucleation reactions during Atomic Layer Deposition, Gregory N. Parsons, North Carolina State University, USA.
- Gold Metal Films by Radical-Enhanced Atomic Layer Deposition, Sean Barry, Carleton University, Canada.
- The synthesis of two dimensional nanomaterials based on Atomic Layer Deposition, Hyungjun Kim, Yonsei University, Korea.
- Evgeni Gornev, SRIME, Russia.